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臭氧发生器是一种带内部产热的气相反应器,由于空气及其他类似气体是不良热导体,电晕放电形成的热量会使气体温度升高，较高的温度可加速臭氧的逆反应,即臭氧还原成氧气,从而降低臭氧产量。因此有效冷却也是提高臭氧发生器效率的一项措施。
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